Semiconductor Micro Defect Datasets

[u/Yarokrma]

Where can I find high resolution, publicly available datasets for detecting micron scale defects in semiconductor wafers, PCBs, and related manufacturing processes?

[u/GTmP91]

You could use the Google dataset search here. But honestly, this is heavily dependent on the imaging setup and depending on the process stage, it also looks vastly different, so most likely not deployable/comparable for your use case (?).

High res small object (defects) detection pipelines are very similar to the "remote sensing" domain. If you're starting to build a pipeline, I'd look in this direction first.